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Applied Research Center



Fabrication

The ARC maintains a significant capability in materials fabrication. This capability is supported by a variety of technologies that allow the deposition, evaporation, and etching of materials.In the area of deposition, the ARC supports Pulsed Laser Deposition (PLD) and Electron Cyclotron Resonance (ECR) Plasma Deposition.

E-Beam Evaporation as well as Sputtering and Mask Aligners are also available.In addition, ARC has the capability of both conventional and Radio Frequency (RF) Etching. Some of the systems available in ARC laboratories include the following:

Pulsed Laser Deposition System
Pulsed Laser Deposition (PLD) System

E-Beam Evaporation
E-Beam Evaporation

Sputtering
Sputtering

Mask Aligners
Mask Aligners


Radio Frequency (RF) Etching


Electron Cyclotron Resonance (ECR) Plasma Deposition